Model No.: S-3000N Manufacturer: Hitachi Location: MSB, E5G

The Hitachi S-3000N is a Variable Pressure SEM with a tungsten electron source and is capable of imaging specimens at high vacuum and also in a variable pressure range from 1-270 Pa. In the variable pressure range, non-conducting specimens can be imaged without coating with a conductive film. The accelerating voltage can be varied over the range 0.3-30kV with a resolution at 25kV of 3.5nm in high vacuum and 5nm in variable pressure mode. The magnification range is 15x to 300Kx. The microscope has an Oxford Inca EDX system with a light element X-ray detector (15mm WD) and has spectrum imaging software which allows a spectrum to be collected at each point in a map allowing selection of elements to be mapped during acquisition.