Model No.: JSM-6320F Manufacturer: JEOL Location: MSB, E32F

The JEOL JSM-6320F is a high resolution scanning electron microscope with a cold field emission source. The microscope can be used in the range 0.5-30kV with a resolution of 1.2nm at 15kV and 2.5nm at 1kV. High resolutions at low accelerating voltages are possible with this instrument due to its objective lens design. A secondary electron detector is integrated into the bore of the lens and the specimen can be bought up into the lens field. Working distances (WD) of as low as 2mm are possible. The microscope is also fitted with a Noran Voyager EDX system with a light element X-ray detector (15mm WD) and an Autrata Back Scatter Detector. There is also a second conventional secondary electron detector below the lens, which gives more topographic images. Magnifications of 25x to 650,000x (at 8mm WD) are possible. It was installed in 1997