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| Model No.: | AXIS-165 |
| Manufacturer: | Kratos |
| Location: | SES, 109B |
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The Kratos AXIS-165 Surface Analysis System is a multi-technique instrument. Our instrument, due Winter 2004/5, will be equipped with X-ray Photon Spectroscopy (XPS - also known as ESCA (Electron Spectroscopy for Chemical Analysis)) and Ion Scattering Spectroscopy (ISS). Both of these techniques are used to sample no more than the top few layers of a specimen (less than 1nm deep) with a spatial resolution in X and Y of down to 30micrometers. For XPS the instrument will have both a dual anode X-ray source (Al/Mg) and a Monochromatic Al X-ray source and is fitted with a charge neutralization coil. Depth profiling will use an argon ion gun. Imaging XPS is possible by using scan plates to raster the focal point of the analyzer over the specimen. For ISS the low energy ions (e.g. 1kV He) are scattered from only the top layer of atoms in the specimen and the energy of the backscattered ions is characteristic of the target atom. The energy spectrum obtained can be interpreted as a mass spectrum of the surface atoms.
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